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Hermetically Sealed Susceptors for Wafer Fabrication Lines

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
29978
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
29978
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Spire Corporation
One Patriots Park Bedford, MA 01730-2396
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1995
Title: Hermetically Sealed Susceptors for Wafer Fabrication Lines
Agency: NSF
Contract: 9461206
Award Amount: $64,919.00
 

Abstract:

N/A

Principal Investigator:

Piran Sioshansi
0

Business Contact:

Small Business Information at Submission:

Spire Corp.
One Patriots Park Bedford, MA 01730

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No