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SiCN High Temperature Microelectromechanical Systems (MEMS) Sensor Suite

Award Information

Department of Energy
Award ID:
Program Year/Program:
2003 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Sporian Microsystems
515 Courtney Way Suite B Lafayette, CO 80026-8821
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2003
Title: SiCN High Temperature Microelectromechanical Systems (MEMS) Sensor Suite
Agency: DOE
Contract: DE-FG02-03ER83784
Award Amount: $99,878.00


72422B03-I SiC- and Si3N4-based ceramic MEMS sensors are among the few types of high temperature sensors, currently under development, that can be utilized for the direct measurement of pressure and temperature distributions in the combustion chamber of turbine engines or other high temperature environments. SiCN MEMS sensors present excellent mechanical properties, electric stabilities, and processing compatibility, as well as low cost for the high temperature application. This project will develop a SiCN MEMS sensor suite, including pressure and temperature sensors, for high temperature applications. Phase I will evaluate existing high temperature pressure and temperature sensor techniques, investigate SiCN electric properties to 1500¿C, determine the feasibility of fabricating the SiCN sensor, complete the structural design for the sensor, and analyze performance. Commercial Applications and Other Benefits as described by awardee: The SiCN high temperature MEMS sensor suite should provide the ¿in-service¿ data required for experiment and control in high temperature applications, and should be highly desired in the energy, space and military industries for electricity generation, atomic reaction, tubing engine, rocket motor, raw material processing, etc.

Principal Investigator:

Wenge Zhang

Business Contact:

Wenge Zhang
Small Business Information at Submission:

Sporian Microsystems, Inc.
4699 Nautilus Court South, #201 Boulder, CO 80301

EIN/Tax ID: 841531263
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No