USA flag logo/image

An Official Website of the United States Government

SiCN High Temperature MEMS Sensor Suite

Award Information

Department of Energy
Award ID:
Program Year/Program:
2004 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Sporian Microsystems
515 Courtney Way Suite B Lafayette, CO 80026-8821
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 2
Fiscal Year: 2004
Title: SiCN High Temperature MEMS Sensor Suite
Agency: DOE
Contract: DE-FG02-03ER83782
Award Amount: $749,973.00


72422-To improve performance and efficiency, reduce pollution, and achieve optimal control of power generation systems (such as turbines, fuel cells, gasification systems, and advanced combustion systems) robust sensing systems are needed to monitor parameters such as pressure and temperature in situ in harsh environments. SiC- and Si3N4-based MEMS sensors are among the few types of sensors that can be utilized for the direct measurement of pressure and temperature distributions in the combustion chamber of turbine engines or other high temperature environments. Unfortunately, the maximum working temperatures of these technologies is not high enough for many applications. This project will develop a temperature and pressure sensor that will be useful for energy generation applications to 1400¿C, with excursions to 1500¿C. Phase I established the feasibility of using SiCN for the application, through detailed design analysis, material property measuements, and experimental validation. Potential end users for the application were involved throughout the project to help guide the design toward commercial applications. Phase II will develop a prototype sensor. This will include fabricating prototype sensors, improving and verifying the performance of the SiCN-based materials, and testing and evaluating the prototypes. Commercial Applications and Other Benefits as described by awardee: The new sensor should allow turbine operators and other energy generation equipment operators to monitor the conditions of equipment in sections that operate at elevated temperatures. Significant market opportunities include the land-based gas turbine industry and the propulsion or aero gas turbine industry.

Principal Investigator:

Wenge Zhang

Business Contact:

Bill K. Garrett
Small Business Information at Submission:

Sporian Microsystems, Inc.
4699 Nautilus Court South, Suite #201 Boulder, CO 80301

EIN/Tax ID: 841531263
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No