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Single Chip Micro Electrical Mechanical Systems (MEMS) Environmental Sensor…

Award Information

Department of Defense
Award ID:
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Sporian Microsystems, Inc.
515 Courtney Way Suite B Lafayette, CO 80026-8821
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2002
Title: Single Chip Micro Electrical Mechanical Systems (MEMS) Environmental Sensor Suite
Agency / Branch: DOD / ARMY
Contract: DAAE30-02-C-1062
Award Amount: $119,731.00


"The objective of this SBIR proposal is to design and develop a low cost, micro-electromechanical systems (MEMS), multi-sensor "suite" consisting of 3-axis shock,temperature and humidity sensors, all operating on a single microchip. The desiredperformance characteristics being: temperature: -50 to 165 degrees F, humidity:10-95% RH (+/- 6%), 3-axis shock: +/- 500 g's (+/-5%). Work will concentrate ontrying to answer the questions of: what are the optimum designs for each sensor typewith an emphasis on device integration, and what packaging solutions/configurationwill best allow for integration and sensor function while minimizing final unitpower and cost. Specifically, one system configuration has been proposed that usescombined optical and mechanical MEMS sensing techniques, which allows for theassociated packaging to satisfy each sensor type's unique packaging requirements.Work tasks will include studying design, packaging, power minimization, relativemerits of various fabrication processes, and analytical and numerical modeling.The work will be performed through a partnership between Sporian Microsystems andLMTS-Eagan that will take advantage of the two companies combined considerableknowledge base in MEMS design, fabrication, integration, subsystem design, andpackaging. To date, the Army has not had a low cost device that could track the completeenvironmental exposure history of the munitions. Therefore one of the drivers fordevel

Principal Investigator:

Kevin Harsh
Director of Engineering

Business Contact:

Brian Schaible
Small Business Information at Submission:

Sporian Microsystems, Inc.
4699 Nautilus Court, Suite 201 Boulder, CO 80301

EIN/Tax ID: 841531263
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No