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Adaptable Sensor Packaging for High Temperature Fossil Fuel Energy Systems

Award Information

Department of Energy
Award ID:
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Sporian Microsystems
515 Courtney Way Suite B Lafayette, CO 80026-8821
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2005
Title: Adaptable Sensor Packaging for High Temperature Fossil Fuel Energy Systems
Agency: DOE
Contract: DE-FG02-05ER84213
Award Amount: $99,610.00


79714S Avanced, integrated control systems will be essential to achieving the cost and performance targets of high-efficiency, low emissions fossil-fuel plants. Sensors based on Micro-electric-mechanical-systems (MEMS) and other types of micro-sensors will play an important role by providing critical real-time measurements that are needed for optimizing these processes. While the sensing elements have been demonstrated, what is missing is packaging to protect the micro-sensors from harsh environments, allow the sensors to be exposed to the gas stream, and interface the sensors with high temperature electronics, housing, and hardware. This project will develop a standard, engineered-testing package, with an integrated protective housing, for using micro-sensors in high temperature harsh environments. Phase I will evaluate existing technologies and materials, determine the suitability of novel materials and processes, identify a preliminary package and housing design, identify an optimal fabrication process, and evaluate associated cost and manufacturability tradeoffs. The final deliverables will include a preliminary package and housing design, as well as a defined fabrication process that will lay the foundation for Phase II. Commercial Applications and other Benefits as described by the awardee: An array of physical and chemical sensing micro-sensor technologies for high temperature energy generation applications should play an important role by optimizing the conversion of fossil fuel for power generation. The result would be a significant increase in plant efficiency, lower emissions, and low maintenance and operating costs.

Principal Investigator:

Wenge Zhang

Business Contact:

Bill K. Garrett
Small Business Information at Submission:

Sporian Microsystems, Inc.
4699 Nautilus Court South, Suite #201 Boulder, CO 80301

EIN/Tax ID: 841531263
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No