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High Temperature MEMS Sensor Suite for Aero-propulsion and Power Technologies

Award Information

Agency:
Department of Defense 		Branch:
Air Force 		Award ID:
73096 		Program Year/Program:
2005 / SBIR
Agency Tracking Number:
F051-192-2006 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
Sporian Microsystems, Inc.
515 Courtney Way - Suite B Lafayette, CO -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2005
Title: High Temperature MEMS Sensor Suite for Aero-propulsion and Power Technologies
Agency / Branch: DOD / USAF
Contract: FA8650-05-M-2588
Award Amount: $99,368.00
 

Abstract:

To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor the engine health status of gas turbine engines and advanced propulsion systems, miniaturized, robust sensors would be highly advantageous for measuring and monitoring physical parameters, such as pressure, temperature, flow. The end objective of this proposed work is to develop, single, high temperature (1300 C), MEMS, silicon carbide nitride (SiCN)-based temperature, pressure, and flow sensor suite suitable for a wide range a uses in gas turbine engines and advanced propulsion system applications. Our technical approach is to use SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures. In addition, the various processing technologies, such as photolithography, DRIE etching, injection molding, embossing, and precise machining can be utilized for the fabrication of the SiCN MEMS devices. Work tasks will include the evaluations of: material electrical properties, existing and new sensor designs, process techniques and suitability, and analytical and numerical modeling for design verification. Technical challenges lie in that the sensors have to survive extremely harsh working conditions, including high temperatures (as high as 3000¿F), elevated pressures, pressure oscillations, corrosive environments, surface coating or fouling, and high particulate loading.

Principal Investigator:

Wenge Zhang
VP of R&D
3035169075
wenge@sporian.com

Business Contact:

Bill Garrett
VP of Operations
3035169075
bill@sporian.com
Small Business Information at Submission:

SPORIAN MICROSYSTEMS, INC.
515 Courtney Way Suite B Lafayette, CO 80026

EIN/Tax ID: 841531263
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No