USA flag logo/image

An Official Website of the United States Government

High Temperature MEMS Sensor Suite for Aero-propulsion and Power Technologies

Award Information

Department of Defense
Air Force
Award ID:
Program Year/Program:
2006 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Sporian Microsystems
515 Courtney Way Suite B Lafayette, CO 80026-8821
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 2
Fiscal Year: 2006
Title: High Temperature MEMS Sensor Suite for Aero-propulsion and Power Technologies
Agency / Branch: DOD / USAF
Contract: FA8650-06-C-2666
Award Amount: $749,754.00


To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor engine instabilities in aero propulsion turbine engines, miniaturized, robust sensors are needed. The end objective of this proposed work is to develop a high temperature measurement (operating to 900oC+) and pressure measurement (operating to 650 psia), MEMS, silicon carbide nitride (SiCN) based sensor suite suitable for use in a aero propulsion turbine engines. Our technical approach is to use SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electrical properties at the high temperatures and harsh environments associated with the application. Work tasks will include the material synthesis, components design, packaging design, prototype fabrication, and the validation of the proposed sensor in laboratory test systems and in simulated environments provided by turbine industry partners. Technical challenges lie in that the sensor suite has to operate and survive over suitable time frames in extremely harsh working conditions, including high temperatures, elevated pressures, pressure oscillations, corrosive environments, surface coating or fouling, and high particulate loading, while maintaining compatibility with established and future turbine infrastructure.

Principal Investigator:

Wenge Zhang
VP of Reaserch and Develo

Business Contact:

Bill Garrett
VP Operations
Small Business Information at Submission:

515 Courtney Way Suite B Lafayette, CO 80026

EIN/Tax ID: 841531263
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No