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Novel High-Turbine Operational SiCN MEMS Sensor Suite

Award Information

Agency:
Department of Defense
Branch:
Navy
Award ID:
82379
Program Year/Program:
2007 / SBIR
Agency Tracking Number:
N062-111-0021
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Sporian Microsystems
515 Courtney Way Suite B Lafayette, CO 80026-8821
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2007
Title: Novel High-Turbine Operational SiCN MEMS Sensor Suite
Agency / Branch: DOD / NAVY
Contract: N68335-07-C-0038
Award Amount: $149,973.00
 

Abstract:

To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor and track engine health status and failure modes of turbine engines and advanced propulsion systems, miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure and temperature, would be highly advantageous. The end objective of this proposed work to develop a single MEMS silicon carbide nitride (SiCN)-based pressure and temperature sensor, and packaging technology suitable for a wide range of turbine engines applications, with an operational range to 1400 degrees C, and the ability to survive short duration (5-10 minute) temperature excursions to 1800 degrees C. Our technical approach is to leverage a proprietary sensor technology based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures. Work tasks will translating the existing technology for this application, including: modifying material formulations, evaluating and defining sensor designs, evaluating and modifying fabrication processes, evaluating and defining the packaging/interface, and proof of principle feasibility experiments. Based on conversations with GE Aviation, for Phase I, we have initially targeted the GE-T64 engine system as the initial representative engine system, and several specific locations of interest within that engine.

Principal Investigator:

Kevin Harsh
Senior Scientist
3035169075
harshk@sporian.com

Business Contact:

Brian Schaible
president
3035169075
brian@sporian.com
Small Business Information at Submission:

SPORIAN MICROSYSTEMS, INC.
515 Courtney Way Suite B Lafayette, CO 80026

EIN/Tax ID: 841531263
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No