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Superconducting Tunnel Junction Arrays for UV Photon Detection

Award Information

National Aeronautics and Space Administration
Award ID:
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
STAR Cryoelectronics, LLC
25 Bisbee Court Ste A Santa Fe, NM 87508-1338
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2005
Title: Superconducting Tunnel Junction Arrays for UV Photon Detection
Agency: NASA
Contract: NNG05CA83C
Award Amount: $69,955.00


An innovative method is described for the fabrication of superconducting tunnel junction (STJ) detector arrays offering true "three dimensional" imaging throughout the UV, visible and near-IR spectrum. Current state-of-the-art STJ detectors are fabricated from thin epitaxial Ta films that must be deposited at high temperatures on sapphire substrates. The subsequent metal films necessary to complete the STJ may be deposited at ambient temperature, but all of these films must be deposited uniformly with low stress and tight thickness control if acceptable device yields are to be achieved. We propose to develop a reliable and reproducible Ta STJ fabrication process using an advanced thin-film deposition tool that features a precision backside heater for reproducible depositions of high-quality epitaxial films and computer-controlled deposition modes that ensure excellent reproducibility and film uniformity (better than 98%) across an entire wafer. The combination of these unique deposition features is essential for the reproducible fabrication of reliable STJ detector arrays with uniform device properties and high production yields.

Principal Investigator:

Robin Cantor
Principal Investigator

Business Contact:

Robin Cantor
Small Business Information at Submission:

STAR Cryoelectronics LLC
25-A Bisbee Court Santa Fe, NM 87508

EIN/Tax ID: 850460916
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No