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SBIR Phase I: Compression Bonded Hermetic Packaging

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
74820
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
0512857
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Stellar Micro Devices
2020 Centimeter Circle Austin, TX 78758-4956
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2005
Title: SBIR Phase I: Compression Bonded Hermetic Packaging
Agency: NSF
Contract: 0512857
Award Amount: $99,850.00
 

Abstract:

This Small Business Innovation Research Phase I project aims to develop a compression bonding technology in two versions -- cold flow seals and cold welding -- for room-temperature, hermetic packaging of MEMS. This project addresses key needs in the MEMS industry, where the lack of versatile, low-cost hermetic packaging techniques is holding back the development of many new MEMS types. Room temperature packaging is vital to improving the production yields of many MEMS, especially optical MEMS (MEOMS). Project will test the low and medium yield strength materials combinations that could be used in the two approaches (mentioned above) and to demonstrate the concept in small packages. The broader impacts from this technology could result in a significant increase to the knowledge base of welding and joining processes, especially as they apply on the micro-scale. The U.S. currently leads in MEMS technology and this project could help maintain that lead.

Principal Investigator:

Nate Potter
Mr
5129977781
cnpotter@earthlink.net

Business Contact:

Mark F. Eaton
Mr
4129977781
eaton@stellardisplay.com
Small Business Information at Submission:

Stellar Micro Devices
2020 Centimeter Circle Austin, TX 78758

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No