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SBIR Phase II: Highly Efficient Exhaust Cleanup Technology for Environmentally…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
67989
Program Year/Program:
2006 / SBIR
Agency Tracking Number:
0419257
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Sundew Technologies, LLC
3400 Industrial Lane Unit 7 Broomfield, CO 80020-
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2006
Title: SBIR Phase II: Highly Efficient Exhaust Cleanup Technology for Environmentally Benign Processing
Agency: NSF
Contract: 0548440
Award Amount: $500,000.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase II project will develop a novel, integrated reactive abatement model (IRAM) that effectively removes solidifying chemicals from the exhaust effluent of atomic layer deposition (ALD) manufacturing processes. ALD and related manufacturing technologies are widely used in the electronics industry and will be critical for emerging nanotechnology applications. However, a key issue is the emission of reactive, toxic and solidfying chemicals that clog and destroy equipment, requiring frequent cleanup and replacement, and create worker safety and environmental concerns. Objectives of this project include developing suitable abatement chemistries and systems for several important generic ALD processes and deriving generalized IRAM methodology that can be used to produce a module that can be integrated into ALD equipment.

Principal Investigator:

Ofer Sneh
Dr
3034662341
ofer@sundewtech.com

Business Contact:

Ofer Sneh
Dr
7208878166
ofer@sundewtech.com
Small Business Information at Submission:

Sundew Technologies
1619 Garnet Street Broomfield, CO 80020

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No