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MMIC Coatings and Encapsulation for Non-Hermetic, Low Cost, Transmit/Receive…

Award Information

Agency:
Department of Defense
Branch:
Navy
Award ID:
70017
Program Year/Program:
2004 / SBIR
Agency Tracking Number:
N041-058-0904
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Sundew Technologies, LLC
3400 Industrial Lane Unit 7 Broomfield, CO 80020-
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2004
Title: MMIC Coatings and Encapsulation for Non-Hermetic, Low Cost, Transmit/Receive Modules with the Reliability of Hermetic Packaging
Agency / Branch: DOD / NAVY
Contract: N00178-04-C-3099
Award Amount: $70,000.00
 

Abstract:

The objective of this SBIR project is to develop a protective overcoat passivation process for wafer-level sealing of Monolithic Microwave/Millimeter wave IC (MMIC). The scarce supply of hermetic packaging choices and the high cost of mil-spec integrated circuit (IC) components used in military and aerospace applications have sparked research focused on using commercial off-the-shelf (COTS) packaging, such as plastic encapsulated microcircuit (PEM), while maintaining hermetic packaging reliability. Atomic layer deposition (ALD) grows continuous, pinhole-free and low-stress films with complete conformality to any surface topology. Such properties render ALD films ideal candidates for wafer-level protection of ICs. A low-cost alternative passivation process to the standard silicon oxide-silicon nitride process will be developed. Low temperature processing and thin films would be used to minimize impact on device reliability and RF performance. A thin film stack with hermetic-like performance would be developed during Phase I. Coated wafers will be die mounted and highly accelerated stress tested (HAST). During Phase I option a suitable ALD system for deposition of encapsulating wafers on MMICs will be designed. System integration and device-level validation will be performed at Phase II, as well as process integration and equipment refinement leading to commercial availability.

Principal Investigator:

Ofer Sneh
President
7208878166
ofer@sundewtech.com

Business Contact:

Ofer Sneh
President
7208878166
ofer@sundewtech.com
Small Business Information at Submission:

SUNDEW TECHNOLOGIES, LLC
1619 Garnet Street Broomfield, CO 80020

EIN/Tax ID: 841612757
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No