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Carbon and Tellurium Doping Sources for Molecular Beam Epitaxy (MBE)

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
18285
Program Year/Program:
1993 / SBIR
Agency Tracking Number:
18285
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
SVT Associates, Inc.
7620 Executive Drive Eden Prairie, MN 55344-3677
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Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1993
Title: Carbon and Tellurium Doping Sources for Molecular Beam Epitaxy (MBE)
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $240,336.00
 

Abstract:

We propose two novel sources for improved carbon and tellurium dopants in MBE growth for III-V compounds semiconductors where heavy doping is required. The compact carbon source is electron beam heated and has a very fast thermal response. It is expected that increased monatomic carbon species in the flux would improve the dopant behavior. The tellurium source produces ionized species which would increase the dopant incorpration significantly. Very high dopant levels could be achieved with the new sources. The new designs are compatible application to existing MBE systems is possible. The prototype desings will be tested in actual thin film growth to evaluate their effectiveness. The Phase I project is anticipated to lead to improved device performance by providing better dopant behavior. by providing better dopant behavior.

Principal Investigator:

Dr Peter P. Chow
6129411898

Business Contact:

Small Business Information at Submission:

Superior Vacuum Technology,
73888 Washington Ave Eden Paririe, MN 55344

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No