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Low Pressure Source for Mass-Selective, Diffusion Assisted Epitaxy

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
56061
Program Year/Program:
2004 / STTR
Agency Tracking Number:
F023-0193
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
SVT Associates, Inc.
7620 Executive Drive Eden Prairie, MN 55344-3677
View profile »
Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2004
Title: Low Pressure Source for Mass-Selective, Diffusion Assisted Epitaxy
Agency / Branch: DOD / USAF
Contract: FA9550-04-C-0051
Award Amount: $499,999.00
 

Abstract:

Epitaxial growth of non-equilibrium thin-film structures, which have high quality and abrupt interfaces, is still the main challenge that limits many material systems for applications in semiconductor devices. In this STTR Phase II program, SVT Associates (SVTA) in collaboration with the University of Minnesota (UMN) will develop a new RF plasma light-mass ion source, compatible with the low-pressure requirements of molecular beam epitaxy (MBE). This source will allow selective enhancement of the motion of surface atoms during thin film growth. Ion-enhanced MBE growth techniques will be used at SVTA and UMN to achieve high-quality growth of challenging material systems such as high-indium-content III-nitride films and novel high-temperature oxides. These are technologically important materials with broad applications in high frequency and high-power electronics, UV photodetectors and emitters, and MEMs and high-temperature device packaging.

Principal Investigator:

Amir M. Dabiran
MBE Lab Manager
9529342100
dabiran@svta.com

Business Contact:

Scott Vandel
Contract Administrator
9529342100
vandel@svta.com
Small Business Information at Submission:

SVT ASSOC., INC.
7620 Executive Drive Eden Prairie, MN 55344

EIN/Tax ID: 411764876
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
University of Minnesota
Dept of Elec. & Comp Eng., 200 Union Street S.E.
Minneapolis, MN 55455
Contact: Philip I. Cohen
Contact Phone: (612) 625-5517
RI Type: Nonprofit college or university