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Advanced Fabrication Techniques for Type-II Superlattice VLWIR Detectors

Award Information

Department of Defense
Missile Defense Agency
Award ID:
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
SVT Associates, Inc.
7620 executive drive eden prairie, MN 55344
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2005
Title: Advanced Fabrication Techniques for Type-II Superlattice VLWIR Detectors
Agency / Branch: DOD / MDA
Contract: FA8650-05-M-5415
Award Amount: $99,933.00


The growth and fabrication of nanostructures, particularly short period Type-II superlattices, rely on high quality crystalline materials. Defects and non-planarities on the substrate surface and non-uniformities in the epitaxial layers can impair device performance. Gallium antimonide (GaSb) substrates have utility in exploring new III-V alloys and devices. While GaSb substrates are available, shipment volume pales in comparison to other III-V substrates such as GaAs and InP. As such, production and preparation of GaSb wafers is far from refined. Surface and growth non-uniformities remain an issue with these substrates. In an effort to solve this problem, we propose to investigate and adopt a two-step approach. First is a novel in situ polishing technique. The surface of GaSb wafers will be polished and cleaned prior to epitaxial growth, and the smooth wafer surface will remain free of atmospheric contamination until semiconductor deposition is complete. Second is a method to reduce contamination of the epilayers from undesired molecular species. Once these techniques are proven viable, the apparatuses can be redesigned with minimal changes and retrofitted to epitaxial systems already deployed in the field.

Principal Investigator:

Brian Hertog
Senior Engineer

Business Contact:

Leslie Price
Business Manager
Small Business Information at Submission:

7620 Executive Drive Eden Prairie, MN 55344

EIN/Tax ID: 411764876
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No