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MOLYBDENUM COATING PROCESS USING LIQUID METALLO-ORGANIC PRECURSORS

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
17434
Program Year/Program:
1992 / SBIR
Agency Tracking Number:
17434
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
TECHNICAL RESEARCH ASSOC., INC.
P.O. Box 15278 Honolulu, HI 96830
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Woman-Owned: Yes
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1992
Title: MOLYBDENUM COATING PROCESS USING LIQUID METALLO-ORGANIC PRECURSORS
Agency: NSF
Contract: N/A
Award Amount: $50,000.00
 

Abstract:

A NEW TECHNIQUE FOR DEPOSITING REFRACTORY METAL COATINGS ON CERAMICS OR SEMICONDUCTORS IS SUGGESTED. THE PROCESS IS BASED UPON A LIQUID PRECURSOR WHICH COULD BE COATED ON SEMICONDUCTOR WAFERS USING THE SAME TECHNIQUES WHICH ARE CURRENTLY USED FOR LIQUID RESIST COATINGS. AFTER BAKING, THE LIQUID PRECURSOR IS REDUCED TO A REFRACTORY METAL COATING IN HYDROGEN. UNLIKE METALLIZATION TECHNIQUES WHICH INVOLVE SPUTTERING OR CVD, THE PROCESS TAKES PLACE ENTIRELY AT ATMOSPHERIC PRESSURE, POTENTIALLY REDUCING THE COMPLEXITY AND COST OF METALLIZATION. ALSO, LARGER, COMPLEX SURFACES CAN BE COATEDPOTENTIALLY MORE EASILY THAN IS POSSIBLE BY VACUUM PROCESSES.

Principal Investigator:

Joseph K. Weeks
8015828080

Business Contact:

Small Business Information at Submission:

Technical Research Associates
410 Chipeta Way Suite 222 Salt Lake City, UT 84108

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No