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REAL TIME, SELF-DIRECTED MBE FLUX CONTROL INCORPORATING IN SITU ELLIPSOMETRY

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
17836
Program Year/Program:
1993 / SBIR
Agency Tracking Number:
17836
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Technology Assessment & Transfer, Inc.
133 Defense Highway, Suite 212 Annapolis, MD 21401-
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Woman-Owned: Yes
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1993
Title: REAL TIME, SELF-DIRECTED MBE FLUX CONTROL INCORPORATING IN SITU ELLIPSOMETRY
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $742,251.00
 

Abstract:

MANY OF THE PERFORMANCE DRIVEN DEMANDS OF FUTURE AIR FORCE WEAPON SYSTEMS ARE DEPENDENT ON THE AVAILABILITY OF ADVANCED SEMICONDUCTOR, BANDGAP ENGINEERED DEVICES AND COMPONENTS. MOLECULAR BEAM EPITAXY (MBE) IS THE PREFERRED METHOD FOR CREATING THESE. BUT IN ORDER TO REACH THE REQUIRED GOAL OF HIGH PURITY, MONOLAYERS WITH ATOMICALLY ABRUPT HETEROJUNCTIONS, PROCESS CONTROL OF ALL DEPOSITION PARAMETERS IS ESSENTIAL. THE MOST IMPORTANT OF THESE IS BEAM FLUX. CONTROL OVER THE FLUX WILL BE ACHIEVED BY COMPLETING THE DEVELOPMENT OF A SELF-DIRECTED, AUTO-LEARNING SYSTEM THAT INCORPORATES REAL TIME, IN SITU ELLIPSOMETRY. DURING PHASE I OF THIS EFFORT, THE FEEDFORWARD TEMPERATURE AND SHUTTER CONTROL SYSTEM WILL BE COMPLETED, AND ELLIPSOMETRY WILL BE INTERFACED WITH AN MBE MACHINE IN ORDER TO ACHIEVE IN SITU MONITORING OF THE DEPOSITION PROCESS. A PHASE II WORK PLAN WILL BE COMPLETED DESCRIBING IN DETAIL HOW THE RESULTS OF THIS PHASE I EFFORT WILL BE INTEGRATED INTO THE CONTROL SYSTEM. A PLAN FOR TRANSFERRING THE CONTROL TECHNOLOGY TO INDUSTRY WILL BE COMPLETED BY INTRODUCING MBE SYSTEMS AND ELLIPSOMETER MANUFACTURERS TO THE CAPABILITY BEING DEVELOPED. THIS WILL INCLUDE A DEMONSTRATION OF THE CONTROL CAPABILITY AT THE END OF PHASE I.

Principal Investigator:

Dr. Yue Cong
3012618373

Business Contact:

Small Business Information at Submission:

Technology Assessment &
133 Defense Highway, Suite 212 Annapolis, MD 21401

EIN/Tax ID: 521253097
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No