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Novel Sensors for Control of Thin Film Deposition

Award Information

Department of Defense
Defense Advanced Research Projects Agency
Award ID:
Program Year/Program:
1996 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Technology Assessment & Transfer, Inc.
133 Defense Highway, Suite 212 Annapolis, MD -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 1996
Title: Novel Sensors for Control of Thin Film Deposition
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $98,320.00


The objectives of the proposed effort are to develop two novel sensors for measuring the product of the film stress with the film thickness, and for measuring the film thickness in situ and in real time during magnetron sputter deposition of thin films. The novel features of these sensors are that they physically move with the production substrates inside the deposition chamber, and that they use substrate materials identical to those used in production. The data from these two sensors will be combined to give a measurement of the mechanical stress in the film as the film is being fabricated. Since the relationship between film stress and processing conditions already is well-documented for magnetron sputter deposition, this stress measurement can be used as input for intelligent film deposition. A preliminary wavelet-based denoising and feature extraction algorithm will be developed. Laboratory simulations will be performed to demonstrate both the sensor feasibility and the analysis methods.

Principal Investigator:

David Palaith

Business Contact:

Small Business Information at Submission:

Technology Assessment &
133 Defense Hwy., #212, Annapolis, MD 21401

EIN/Tax ID: 521253097
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No