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HIGH-FORCE MICROACTUATOR USING NICKEL-TITANIUM SHAPE-MEMORY ALLOY

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
11873
Program Year/Program:
1991 / SBIR
Agency Tracking Number:
11873
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
TINI ALLOY CO.
1619 Neptune Drive San Leandro, CA 94577
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1991
Title: HIGH-FORCE MICROACTUATOR USING NICKEL-TITANIUM SHAPE-MEMORY ALLOY
Agency: NSF
Contract: N/A
Award Amount: $249,334.00
 

Abstract:

TINI ALLOY COMPANY PROPOSES TO DEVELOP HIGH-FORCE MICRO-ACTUATORS USING VACUUM DEPOSITED SHAPE-MEMORY ALLOYS. IMPROVED MICRO-ACTUATORS ARE NEEDED FOR MICRO-MECHANICAL DEVICES NOW BEING RESEARCHED IN LABORATORIES (AND WHICH WILL REACH MARKET MATURITY IN A FEW YEARS) AND FOR AT LEAST ONE DEVICE NOW IN COMMERCIAL PRODUCTION (A GAS CHROMATOGRAPH ON A SILICON CHIP). THE POTENTIAL ADVANTAGE OF SHAPE-MEMORY ALLOY MICROACTUATORS OVER ELECTROSTATIC DEVICES IS SEVERAL ORDERS OF MAGNITUDE INCREASE IN FORCE AND DISPLACEMENT. TINI SHAPE-MEMORY ALLOYTOLERATES LARGE STRAIN, 3-5 PERCENT, AND PRODUCES LARGE STRESS, GREATER THAN 100 MPA. THIN FILMS OF TINI SHAPE-MEMORY ALLOY, WHICH HAVE BEEN DEMONSTRATED IN OUR LABORATORY TO EXHIBIT A FORCEFUL SHAPE RECOVERY, WILL BE INCORPORATED WITH SILICON COMPONENTS BY MICRO-FABRICATION. THE COMBINED TECHNOLOGIES OF SHAPE-MEMORY ALLOY AND SILICON WILL RESULT IN A NEW ENGINEERING MATERIAL FOR MICRO-MECHANICAL APPLICATIONS. THE RESEARCH OBJECTIVES TO BE ADDRESSED INCLUDE: IMPROVED VACUUM SPUTTERING TECHNIQUES TO IMPROVE YIELD AND QUALITY OF FILM; PHYSICAL CHARACTERIZATION OF TINI FILM; PLANAR FABRICATION BY MASKING AND SELECTIVE ETCHING; AND DEVELOPMENT OF FUNCTIONAL COMPONENTS SUCH AS VALVE AND PUMP ACTUATORS.

Principal Investigator:

Dr A David Johnson
0

Business Contact:

Small Business Information at Submission:

Tini Alloy Co
1144 65th Street Oakland, CA 94608

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No