Light scattered from clean semiconductor wafers is due to both surface and subsurface defects. scatter from surface defects generally dominates by an order of magnitude or two. a method to separate subsurface scatter from surface scatter has been found, and it is proposed here to utilize that… More

Scatter from ground-based laser ports (weapons, communication systems, range finders) can be large enough that the laser location may be determined by detectors positioned well away from the beam. port scatter can be reduced, but not eliminated, through the use of baffles to limit direct viewing of… More