Optical Microsystem Sensors for Vehicle Systems
Agency / Branch:
DOD / ARMY
This Phase II program is concerned with the manufacturing of high quality, robust, microsystems or microsensors incorporating in a solid glass substrate three-dimensional microfluidic circuitry side-by-side with three-dimensional waveguide based optics. The manufacturing of the optical waveguides will be accomplished using a direct-write process based on the use of femtosecond laser pulses to locally nanostructure the glass substrate. The microfluidic circuitry will be produce using the same femtosecond laser based process, assisted with chemical etching.
Small Business Information at Submission:
755 Phoenix Drive Ann Arbor, MI 48108
Number of Employees: