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In-Line Real Time Wafer Level Monitoring Techniques

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
26101
Program Year/Program:
1994 / SBIR
Agency Tracking Number:
26101
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Turner Engineering Technology
P.o. Box 1502, 612 Oak Street Roanoke, TX 76262
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1994
Title: In-Line Real Time Wafer Level Monitoring Techniques
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $54,532.00
 

Abstract:

We propose to research in-line real time wafer level monitoring techniques for use in development of new semiconductor processes and for the monitoring of semiconductor process equipment and techniques as a process control function. All of these techniques will monitor actual reliability failure mechanisms not indirect performance criteria. All will minimize the processing necessary between the actual process step in question and the ability to accomplish the required reliability test. This program will concentrate on tests that can be performed with existing test equipment and probing techniques.

Principal Investigator:

Timothy E. Turner
8174919517

Business Contact:

Small Business Information at Submission:

Turner Engineering Technology
P.o. Box 1502, 612 Oak Street Roanoke, TX 76262

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No