DEVELOPMENT OF BULK DENSITY AL(2)O(3) THIN FILMS

Award Information

Agency: Department of Defense	Branch: Navy	Award ID: 10338	Program Year/Program: 1989 / SBIR
Agency Tracking Number: 10338	Solicitation Year: N/A	Solicitation Topic Code: N/A	Solicitation Number: N/A

Small Business Information: UES, Inc.
4401 Dayton-Xenia Road Dayton, OH -
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Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No

Phase 1: Fiscal Year: 1989

Title: DEVELOPMENT OF BULK DENSITY AL(2)O(3) THIN FILMS

Agency / Branch: DOD / NAVY

Contract: N/A

Award Amount: $49,822.00

Abstract:
THIN FILMS OF AL(2)O(3) ARE USUALLY DEPOSITED BY TECHNIQUES SUCH AS CVD OR ACTIVATED REACTIVE EVAPORATION. THESE PROCESSES, HOWEVER, REQUIRE A RATHER THIGH (800-1200 DEG C) SUBSTRATE TEMPERATURE WHICH RESULTS IN THE DIFFUSION OF SUBSTRATE MATERIAL INTO THE COATING, THUS, MODIFYING THE COATING PROPERTIES. BULK DENSITY FILMS ARE NOT COMMONLY PRODUCED BY THESE TECHNIQUES. WE PROPOSE TO USE ION BEAM ASSISTED (IBA) ELECTRON BEAM EVAPORATION TECHNIQUE TO FABRICATE BULK DENSITY AL(2)O(3) ON CARBON AND SILICON SUBSTRATES. LOW ENERGY (500EV-1500EV) 0-1 IONS WILL BE USED TO BOMBARD THE AL(2)O(3) FILMS DURING DEPOSITION BY ELECTRON BEAM EVAPORATION. RUTHERFORD BACKSCATTERING SPECTROMETRY (RBS) IN COMBINATION WITH CROSS SECTION TRANSMISSION ELECTRON MICROSCOPY (X-TEM) WILL BE USED TO EVALUATE THE DENSITY OF THIN FILMS.

Principal Investigator:
Rabi Bhattacharya
5134266900

Business Contact:

Small Business Information at Submission:

Universal Energy Systems Inc
4401 Dayton-xenia Rd Dayton, OH 45432

EIN/Tax ID:

DUNS: N/A

Number of Employees:

Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No