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ULTRA-THIN TIO2 DIELECTRIC FILM FOR HIGH CAPACITANCE CAPACITORS

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
25564
Program Year/Program:
1994 / SBIR
Agency Tracking Number:
25564
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
UES, Inc.
4401 Dayton-Xenia Road Dayton, OH 45432-
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Woman-Owned: Yes
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1994
Title: ULTRA-THIN TIO2 DIELECTRIC FILM FOR HIGH CAPACITANCE CAPACITORS
Agency / Branch: DOD / MDA
Contract: N/A
Award Amount: $62,735.00
 

Abstract:

The proposed research activity attempts to develop an ultra-thin capacitor using TiO(2) as dielectric film for high-temperature microelectronics in commercial or military applications. There has been an increasing demand for a high dielectric constant insulator for replacement of SiO. TiO(2) film is promising because it has a high dielectric constant with a sufficiently high breakdown voltage. In spite of continuous efforts for diamond and SiC film capacitor applications, it has been difficult to provide sufficient reliability toward LSI fabrication due to recrystallization of dielectric film which results in reduction of dielectric breakdown strength. Defect density of dielectric film significantly increases as thickness of the film is reduced to several hundred angstroms. Application of the ulta-thin capacitor to a switch-load resistor memory cell makes it possible to reduce the memory cell area to one-third that of a conventional memory cell. Techniques, such as thermal oxidation of titanium sputtering, and CVD, will be used to deposit TiO(2) thin film. The quality of the film, electrical properties such as breakdown voltage, dissipation factor, and equivalent series resistance will be evaluated. The prototypical ultra-thin TiO(2) capacitor will be demonstrated and life-tested.

Principal Investigator:

Bang-hung Tsao
5134266900

Business Contact:

Small Business Information at Submission:

Ues, Inc.
4401 Dayton-xenia Road Dayton, OH 45432

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No