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DEVELOPMENT OF THIN REFRACTORY FILMS OF TIB2 BN NBN AND SIC ON FUSED SIO2…

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
6600
Program Year/Program:
1987 / SBIR
Agency Tracking Number:
6600
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Ultramet
12173 Montague Street Pacoima, CA 91331-2210
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1987
Title: DEVELOPMENT OF THIN REFRACTORY FILMS OF TIB2 BN NBN AND SIC ON FUSED SIO2 CRUCIBLES
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $49,996.00
 

Abstract:

THE ABILITY TO CONTROL UNWANTED IMPURITY LEVELS DURING ELECTRONIC DEVICE FABRICATION IS ESSENTIAL TO ESTABLISHING THE DESIRED PROPERTIES FOR DEVICE RELIABILITY. IN PHASE I ULTRAMET WILL DEMONSTRATE THE FEASIBILITY OF DEPOSITING THIN, ULTRA-HIGH PURITY FILMS OF BN, TIB2, NBN AND SIC ON FUSED SIO2 CRUCIBLES. A SUCCESSFUL COMPLETION OF PHASE I WILL RESULT IN METALLIC IMPURITIES IN THE COATINGS OF 5PPM AND COATING ADHERENCE UNDER CYCLIC CONDITIONS FROM ROOM TEMPERATURE TO 1300 DEG C. BASED ON THE EXTENSIVE CVD EXPERIENCE AT ULTRAMET, WE FEEL THAT THIS PROGRAM HAS A VERY HIGH PROBABILITY OF SUCCESS.

Principal Investigator:

R b kaplan
8188990236

Business Contact:

Small Business Information at Submission:

Ultramet
12173 Montague St Pacoima, CA 91331

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No