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SBIR Phase I: Saving post-CMP Wafers using ACIM

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
52630
Program Year/Program:
2001 / SBIR
Agency Tracking Number:
0060137
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Uncopiers, Inc.
910 Poyntz Ave Manhattan, KS 66502-0000
View profile »
Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: Yes
 
Phase 1
Fiscal Year: 2001
Title: SBIR Phase I: Saving post-CMP Wafers using ACIM
Agency: NSF
Contract: 0060137
Award Amount: $100,000.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase I project is to save semiconductor wafers from being deeply scratched by unchecked large errant particles in chemical mechanical planarizing or polishing (CMP) slurries. CMP has become the method of choice for restoring the surface trueness of wafers at all stages of its manufacture. No method currently exists that can implement a CMP-safe slurry at the point of use. The proposed novel technology of acoustic coaxing induced microcavitation (ACIM) is a means to constructively control acoustic microcavitation and direct its high intensity energy implosions at specific particle sites. ACIM will achieve both the detection and destruction of the stray large particles and render the entire slurry CMP-safe at the point of use. The ACIM slurry monitor-comminuter would be the first fully in-line, real-time, point of use method for detecting stray large particles and agglomerates and for reducing them to a nano-fine state. The rapidly growing CMP industry presents a well-developed market for this environmentally friendly ACIM tool

Principal Investigator:

Isabel Zambrano
7852934917
Uncopiers@iwon.com

Business Contact:

Isabel Zambrano
President & CEO
7852934917
uncopiers@iwon.com
Small Business Information at Submission:

Uncopiers, Inc.
6923 Redbud Drive Manhattan, KS 66503

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No