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SBIR Phase II: A Quality Monitor for Enabling Water Recycling in…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
74881
Program Year/Program:
2007 / SBIR
Agency Tracking Number:
0512803
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Uncopiers, Inc.
910 Poyntz Ave Manhattan, KS 66502-0000
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: Yes
 
Phase 2
Fiscal Year: 2007
Title: SBIR Phase II: A Quality Monitor for Enabling Water Recycling in Semiconductor Processing - The Particle Scout
Agency: NSF
Contract: 0646557
Award Amount: $500,000.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase II Project concerns Ultrapure Water (UPW), the life blood of the semiconductor industry. The proposed instrument seeks to satisfy the ITRS requirements on two counts: 1. full flow inspection, and 2. detection of sub-100nm liquid-borne particles. 1. A typical semiconductor fab uses about 3 million gallons of UPW every day, and the ITRS, in its attempt to conserve the precious resource, water, mandates that 90% of UPW be recycled/reused by 2010. The recycled UPW loop will need full flow monitoring, which the proposed Particle Scout will do. 2. The purity of UPW directly affects the chip yield, because the final operation on wafers is UPW rinse and any contaminants present in the UPW contaminate the wafers it rinses. As the industry moves to sub-100 nm nodes the ITRS particle detection requirements fall to sub-50 nm. Particle Scout for monitoring in real-time the particulate purity of recycled UPW for use in Semiconductor processing successfully overcomes a critical technological barrier facing the IC manufacturing industry today. Beyond IC manufacturing industry it will find applications in all enterprises where UPW is used: Power generation, Nuclear Reactors, Pharmaceutical industry, Biotechnology, Space exploration, and processing of Advanced high purity chemicals.

Principal Investigator:

Sameer I. Madanshetty
PhD
7853174949
sameer@uncopiers.com

Business Contact:

Sameer I. Madanshetty
PhD
7853174949
sameer@uncopiers.com
Small Business Information at Submission:

Uncopiers, Inc.
6923 Redbud Drive 6745 HOLLISTER AVENUE Manhattan, KS 66503

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No