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SBIR Phase I: CMP Slurry Monitor

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
88346
Program Year/Program:
2008 / SBIR
Agency Tracking Number:
0740982
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Uncopiers, Inc.
910 Poyntz Ave Manhattan, KS 66502-0000
View profile »
Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: Yes
 
Phase 1
Fiscal Year: 2008
Title: SBIR Phase I: CMP Slurry Monitor
Agency: NSF
Contract: 0740982
Award Amount: $100,000.00
 

Abstract:

This SBIR Phase I project is to develop a Chemical Mechanical Polishing (CMP) Slurry Monitor as a fully in-line, real-time, point of use instrument that will detect and disperse large agglomerates in the nanofine slurries used in IC manufacture. The monitor will not only detect scratch inducing agglomerates but will also attempt to destroy them. Successful development of the slurry monitor will improve yields and decrease costs for the semiconductor industry. The principles of induced microcavitation may find wide applications in liquid/particle processing. By detecting and destroying agglomerates improved processes and products will be enabled.

Principal Investigator:

Sameer I. Madanshetty
PhD
7853174949
sameer@uncopiers.com

Business Contact:

Sameer I. Madanshetty
PhD
7853174949
sameer@uncopiers.com
Small Business Information at Submission:

Uncopiers, Inc.
6923 Redbud Drive Manhattan, KS 66503

EIN/Tax ID: 481222811
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No