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SBIR Phase II: An Innovative Method for Removing Resist from Wafers

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
79531
Program Year/Program:
2008 / SBIR
Agency Tracking Number:
0611170
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Uncopiers, Inc.
910 Poyntz Ave Manhattan, KS 66502-0000
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: Yes
 
Phase 2
Fiscal Year: 2008
Title: SBIR Phase II: An Innovative Method for Removing Resist from Wafers
Agency: NSF
Contract: 0750623
Award Amount: $500,000.00
 

Abstract:

The Small Business Innovation Research (SBIR) Phase II project seeks to develop an innovative, environment friendly method for removing resist from semiconductor wafers. After every lithography step, and the following processing step, e.g., etching or ion implantation, the process-hardened resist must be stripped away and the wafer cleaned. Existing photoresist removal methods (plasma ashing and wet chemical stripping) are proving too aggressive for current state-of-the-art interconnect materials-they tend to degrade and damage low-k dielectrics and corrode copper; they are also detrimental to the delicate device structures. In this project the resist stripping and wafer cleaning are accomplished in a single process step through controlled microcavitation in ultrapure water with no damage to the underlying layers and features. Resist stripping is a growing $2.64B market. The proposed resist remover and wafer cleaner successfully overcome a critical technological barrier facing the IC manufacturing industry today. Beyond the IC manufacturing industry, the microcavitation based layer removal will find applications in all areas requiring controlled thin film removal,e.g., MEMS, PCB, optics, automotive (paint removal), and aerospace. This will be an enabling technology useful in thin film processing. Microcavitation is a chemical free, environmentally friendly technology.

Principal Investigator:

Hang Ji
PhD
7857761036
hji@uncopiers.com

Business Contact:

Hang Ji
PhD
7857761036
hji@uncopiers.com
Small Business Information at Submission:

Uncopiers, Inc.
6923 Redbud Drive Manhattan, KS 66503

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No