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LOW COST SILICON ACCELEROMETER

Award Information

Agency:
Department of Defense
Branch:
Navy
Award ID:
6637
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
6637
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Waddan Systems
8801 ENCINO AVE SHERWOOD FOREST, CA 91325-3228
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1990
Title: LOW COST SILICON ACCELEROMETER
Agency / Branch: DOD / NAVY
Contract: N/A
Award Amount: $577,300.00
 

Abstract:

RESEARCH TO DESIGN AND DEVELOP A LOW COST INERTIAL GRADE SILICON ACCELEROMETER IS PROPOSED HERE. THE MAIN OBJECTIVE OF THE EFFORT IS TO SHOW THAT IT IS POSSIBLE TO BUILD AN ACCELEROMETER ON A SINGLE CRYSTAL SILICON CHIP, CAPABLE OF HANDLING MID-COURSE GUIDANCE REQUIREMENTS OF A MISSILE. A SILICON WAFER IS CHEMICALLY ETCHED THROUGH A MULTI-STAGE PROCESS TO YIELD TORSIONALLY FLEXIBLE HINGE FLEXURES SUPPORTING A PROOF MASS. THE ACCELEROMETER UTILIZES A CAPACITIVE PICK-OFF TO MEASURE THE DEFLECTION OF THE PROOF MASS. THE PICK-OFF SIGNAL IS AMPLIFIED AND FED TO RESTORING CONTROLLER WHICH DRIVES THE ELECTROSTATIC FORCER TO COUNTER THE INERTIAL FORCE ACTING ON THE PROOF MASS. THE SIGNAL DIFFERENTIAL VOLTAGE INPUT TO THE FORCER IS A DIRECT MEASURE OF THE APPLIED ACCELERATION. A DETAILED DESIGN ANALYSIS WILL BE PERFORMED BEFORE BUILDING AN ENGINEERING MODEL OF THE ACCELEROMETER.

Principal Investigator:

Dr Mahendra Singh
8187049783

Business Contact:

Small Business Information at Submission:

Waddan Systems
8801 Encino Ave Northridge, CA 91325

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No