USA flag logo/image

An Official Website of the United States Government

Stereoscopic Inspection for Microelectronics Using Multiple Imaging Sensors

Award Information

Agency:
Department of Defense
Branch:
Army
Award ID:
28757
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
28757
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Waterjet Technology Inc
21414 68th Avenue South Kent, WA 98032
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1995
Title: Stereoscopic Inspection for Microelectronics Using Multiple Imaging Sensors
Agency / Branch: DOD / ARMY
Contract: N/A
Award Amount: $69,852.00
 

Abstract:

Stereoscopic imaging is a powerful technique that can provide (1) 3D visual inspections (for both surface and interior features), (2) 3D measurements, and (3) 3D defect algorithms. We propose a PC-based microelectronics inspection system that takes advantage of not only stereo imaging, but also multisensor imaging. Method will be developed for obtaining real-time stereo images from X-ray and infrared cameras, both of which are very important for microelectronics. Real-time algorithms will be developed for automatic depth measurement using stereo pairs from a single sensor type. Then the depth information from two or more sensors will be used in conjunction to develop defect recognition algorithms that make use of the added information. We will explore how new signal processing and detection technologies (e.g., neural networks, fuzzy logic, and rule-based systems) can aid in automating microelectronic inspections. Our primary goals for Phase I are to demonstrate stereoscopic 3D imaging of typical microelectronic components on a PC computer, using both X-ray and infrared images, and to produce a System Concept Document that will (a) review current literature and inspection procedures, (b) explore concepts and algorithms for multisensor data fusion, and (c) present a preliminary design for the prototype system to be built during Phase II.

Principal Investigator:

Dr. Peter H.t. Liu
2068729500

Business Contact:

Small Business Information at Submission:

Waterjet Technology, Inc.
21414 68th Avenue South Kent, WA 98032

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No