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MODELING OF 3-D DIFFRACTION AND SCATTERING FROM SUBMICRON OBJECTS ON SILICON…

Award Information

Agency:
National Science Foundation 		Branch:
N/A 		Award ID:
2710 		Program Year/Program:
1985 / SBIR
Agency Tracking Number:
2710 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
Weidlinger Associates, Inc.
375 Hudson St FL 12 New York, NY -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1985
Title: MODELING OF 3-D DIFFRACTION AND SCATTERING FROM SUBMICRON OBJECTS ON SILICON FOR PARTICULATE MONITORING AND PHOTOLITHOGRAPHY
Agency: NSF
Contract: N/A
Award Amount: $40,000.00
 

Abstract:

N/A

Principal Investigator:

Greogory L Wojcik
Associate
4158570960

Business Contact:

Small Business Information at Submission:

Weidlinger Associates
333 Seventh Ave New York, NY 10001

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No