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MONOLAYER RESOLUTION CHARACTERIZATION BY VARIABLE ANGLE SPECTROSCOPIC…

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
6650
Program Year/Program:
1988 / SBIR
Agency Tracking Number:
6650
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Woollam J A Co
315 S 9th St - Ste 22 Lincoln, NE 68508
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1988
Title: MONOLAYER RESOLUTION CHARACTERIZATION BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY (VASE)
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $426,000.00
 

Abstract:

ELLIPSOMETRY USES POLARIZED LIGHT REFLECTANCE TO CHARACTERIZE SURFACES, INTERFACES, AND THIN FILMS. ELLIPSOMETRY HAS TRADITIONALLY BEEN DONE USING A FEW (USUALLY ONE) DISCRETE ANGLES OF INCIDENCE OF THE LIGHT BEAM WITH A SURFACE NORMAL, AND A FEW SELECTED WAVELENGTHS (FREQUENTLY ONLY 632.8 NM FROM A HENE LASER). RECENTLY IT WAS SHOWN (BY WOOLLAM AND COWORKERS) THAT USING VARIABLE ANGLE OF INCIDENCE SPECTROSCOPIC ELLIPSOMETRY THE SENSITIVITY CAN BE ENHANCED BY MORE THAN THREE ORDERS OF MAGNITUDE. THE USEFULNESS OF THIS TECHNIQUE FOR HETEROJUNCTION STRUCTURES WAS DEMONSTRATED. THE PURPOSE OF THIS CONTRACT IS THREEFOLD: TO DEVELOP VASE FOR MOCVD GROWN MULTILAYER SEMICONDUCTOR DIAGNOSTICS, TO ENHANCE THE DATA ACQUISITION SPEED BY A FACTOR OF TEN (THUS PERMITTING IN-SITU CAPABILITIES), AND TO DEVELOP THE CAPABILITY TO ANALYZE DATA FROM SEMICONDUCTOR SUPERLATTICES USING AN IBM AT COMPATIBLE COMPUTER.

Principal Investigator:

John A Woollam
4024721964

Business Contact:

Small Business Information at Submission:

Woollam J A Co
2436 Sheridan Lincoln, NE 68502

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No