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HIGH RESOLUTION INTERFEROMETRIC OPTICAL PROFILER FOR SUBMICRON LINEWIDTH…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
11881
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
11881
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Wyko Corp.
2650 E. Elvira Road Tucson, AZ 85706
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1990
Title: HIGH RESOLUTION INTERFEROMETRIC OPTICAL PROFILER FOR SUBMICRON LINEWIDTH MEASUREMENTS
Agency: NSF
Contract: N/A
Award Amount: $50,000.00
 

Abstract:

N/A

Principal Investigator:

Katherine Creath
Optical Engineer
0

Business Contact:

Small Business Information at Submission:

Wyko Corp.
1955 East Sixth Street Tucson, AZ 85719

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No