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Cryogenic MEMS Pressure Sensor

Award Information

Agency:
National Aeronautics and Space Administration
Branch:
N/A
Award ID:
90634
Program Year/Program:
2009 / SBIR
Agency Tracking Number:
084069
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Wyoming Silicon, LLC
1923 Big Horn Avenue, Unit B Sheridan, WY 82801-6028
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2009
Title: Cryogenic MEMS Pressure Sensor
Agency: NASA
Contract: NNX09CD35P
Award Amount: $100,000.00
 

Abstract:

A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of continuous low-power operation and provides accuracies as low as 0.002 % of reading.

Principal Investigator:

Zachary Gray
Principal Investigator
3077522615
zg@WyomingSilicon.com

Business Contact:

Zachary A. Gray
Business Official
3077522615
zg@WyomingSilicon.com
Small Business Information at Submission:

Wyoming Silicon, LLC
1923 Big Horn Avenue, Unit B Sheridan, WY 82801

EIN/Tax ID: 161647551
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No