Cryogenic MEMS Pressure Sensor

Award Information

Agency: National Aeronautics and Space Administration	Branch: N/A	Award ID: 90634	Program Year/Program: 2009 / SBIR
Agency Tracking Number: 084069	Solicitation Year: N/A	Solicitation Topic Code: N/A	Solicitation Number: N/A

Small Business Information: Wyoming Silicon, LLC
1923 Big Horn Avenue, Unit B Sheridan, WY 82801-6028
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Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No

Phase 1: Fiscal Year: 2009

Title: Cryogenic MEMS Pressure Sensor

Agency: NASA

Contract: NNX09CD35P

Award Amount: $100,000.00

Abstract:
A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of continuous low-power operation and provides accuracies as low as 0.002 % of reading.

Principal Investigator:
Zachary Gray
Principal Investigator
3077522615
zg@WyomingSilicon.com

Business Contact:
Zachary A. Gray
Business Official
3077522615
zg@WyomingSilicon.com

Small Business Information at Submission:

Wyoming Silicon, LLC
1923 Big Horn Avenue, Unit B Sheridan, WY 82801

EIN/Tax ID: 161647551

DUNS: N/A

Number of Employees:

Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No