Cryogenic MEMS Pressure Sensor
A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of continuous low-power operation and provides accuracies as low as 0.002 % of reading.
Small Business Information at Submission:
Wyoming Silicon, LLC
1923 Big Horn Avenue, Unit B Sheridan, WY 82801
Number of Employees: