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SPUTTERED METALLIC GLASS FOR ACCELEROMETERS

Award Information

Agency:
Department of Defense
Branch:
Navy
Award ID:
9267
Program Year/Program:
1989 / SBIR
Agency Tracking Number:
9267
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Xi Magnetics Inc.
Box 457a - Rd 4 Coatesville, PA 19320
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1989
Title: SPUTTERED METALLIC GLASS FOR ACCELEROMETERS
Agency / Branch: DOD / NAVY
Contract: N/A
Award Amount: $400,000.00
 

Abstract:

THE IMMEDIATE GOAL OF THIS PROPOSED WORK IN PHASE I IS TO SPUTTER DEPOSIT AND TEST SAMPLES OF METALLIC GLASS ON SILICON WAFERS. THE LONG TERM GOAL IS TO FABRICATE LOW COST, MONOLITHIC ACCELEROMETERS WHERE ALL OF THE COMPONENTS ARE INTEGRATED ONTO A SINGLE SILICON WAFER. THE MOST IMPORTANT PHASE I TASK WILL BE TO DEVELOP TECHNIQUES FOR DEPOSITING FILMS WITH BUILT-IN UNIAXIAL ANISOTROPY AND VERY LOW LEVELS OF INTRINSIC STRESS. THEN THE SENSITIVITY OF THESE FILMS (I.E. THE CHANGES IN PERMEABILITY AS A FUNCTION OF APPLIED STRESS) WILL BE MEASURED. A SECOND, LOWER PRIORITY PHASE I TASK WILL BE TO STUDY WAYS OF ELIMINATING THE USE OF DISCRETE SENSING COILS IN FAVOR OF A TRULY MONOLITHIC CONSTRUCTION.

Principal Investigator:

Dr John L Wallace
2153471768

Business Contact:

Small Business Information at Submission:

Xi Magnetics Inc.
Box 457a - Rd 4 Coatesville, PA 19320

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No