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Manufacturing Assembly Technology for Producing Low-Cost Mini SEMs

Award Information

Department of Defense
Defense Advanced Research Projects Agency
Award ID:
Program Year/Program:
2004 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
ZYVEX Corporation
1321 N. Plano Road Richardson, TX 75081-0242
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 2
Fiscal Year: 2004
Title: Manufacturing Assembly Technology for Producing Low-Cost Mini SEMs
Agency / Branch: DOD / DARPA
Contract: W31P4Q-04-C-R289
Award Amount: $749,523.00


This program will provide a key manufacturing breakthrough for high-performance inexpensive miniature SEMs. We plan to develop a MEMS, microassembly-based, fully functional mini-SEM having 1/10,000 the volume of current units. Zyvex is a dynamic small firm with a highly qualified technical team, experienced management, and the advantage of a $25M / 5 year NIST-ATP award that is funding the continued development of the core assembly technology. Our commercialization partner in Phase II, FEI, is one of the leading manufacturers of SEMs and has committed to at least $200K of in-kind support. Zyvex's unique assembly technology combined with FEI's expertise and experience in successfully producing and marketing charged particle microscopes provides us with an excellent opportunity for commercialization. DoD applications include: routine maintenance inspection of helicopter rotors and other critical structural members of military aircraft and vehicles; backpack units to give special forces unique forensic capabilities; and an imaging component of biowarfare agent detection systems to protect both military buildings and war-fighters in the field. Commercial applications include: desktop SEMs for industrial and educational institutions; backpack units for geologists, forensic specialists, etc.; arrayed SEMs for IC inspection; and arrays of columns for maskless high-resolution lithography.

Principal Investigator:

Rahul Saini
MEMS Staff Engineer

Business Contact:

Sha-Chelle Manning
Director of Alliances
Small Business Information at Submission:

1321 N. Plano Road Richardson, TX 75081

EIN/Tax ID: 752704600
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No