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In-Situ Characterization of Photresist Properties by Fourier Trnasform Infrared…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
46729
Program Year/Program:
1999 / SBIR
Agency Tracking Number:
9860798
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
On-Line Technologies, Inc
87 Church St East Hartford, CT 06108
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1999
Title: In-Situ Characterization of Photresist Properties by Fourier Trnasform Infrared Based IR Spectroscopy
Agency: NSF
Contract: 9860798
Award Amount: $99,699.00
 

Abstract:

N/A

Principal Investigator:

Matthew Richter

Business Contact:

Small Business Information at Submission:

On-Line Technologies Inc
87 Church Street East Hartford, CT 99999

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No