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Company Information:
Name:
Araca, Inc.
Address:
2550 E River Rd, Suite 12204
Tucson, AZ 85718-9525
Tucson, AZ 85718-9525
Located in HUBZone:
No
Woman-Owned:
No
Minority-Owned:
No
URL:
N/A
Phone:
N/A
Award Totals:
Award List:
SBIR Phase I: Novel Slurry Injector Device for Chemical Mechanical Planarization Application
Award Year / Program / Phase:
2011 / SBIR / Phase I
Agency:
NSF
Principal Investigator:
Yun Zhuang
Award Amount:
$150,000.00
Abstract:
This Small Business Innovation Research (SBIR) Phase I project will develop and implement a novel slurry injection device for applications in chemical mechanical planarization (CMP), a key-enabling technology for integrated circuit (IC) manufacturing. In the most current CMP commercial polishers,… More
SBIR Phase II: Novel Slurry Injector Device for Chemical Mechanical Planarization Application
Award Year / Program / Phase:
2012 / SBIR / Phase II
Agency:
NSF
Principal Investigator:
Yun Zhuang
Award Amount:
$500,000.00
Abstract:
This Small Business Innovation Research (SBIR) Phase II project aims to develop a novel slurry injection device for applications in chemical mechanical planarization (CMP), a key technology for integrated circuit (IC) manufacturing. Different from the current slurry application method that applies… More