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Ultra High Temperature Capacitive Pressure Sensor

Award Information

Agency:
National Aeronautics and Space Administration
Branch:
N/A
Award ID:
Program Year/Program:
2011 / SBIR
Agency Tracking Number:
094590
Solicitation Year:
2009
Solicitation Topic Code:
A2.02
Solicitation Number:
Small Business Information
Sporian Microsystems, Inc.
515 Courtney Way Suite B Lafayette, CO 80026-8821
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2011
Title: Ultra High Temperature Capacitive Pressure Sensor
Agency: NASA
Contract: NNX11CA45C
Award Amount: $599,993.00
 

Abstract:

To improve the working performance, increase efficiency, reduce cost, and track system health status and failure modes of advanced propulsion systems; miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure, would be highly advantageous. Technical challenges for developing reliable sensing systems lie in extremely harsh working conditions the micro sensors must operate. In addition to high temperatures and pressures, these conditions include oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. High temperature (300-1350oC) capacitive pressure sensors are of particular interest due to their inherent suitability for wireless readout schemes. The objective of this proposed work is to develop a capacitive pressure sensor based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures (up to1600ºC). The Phase II effort will include: the development of materials formulations and fabrication processes to realize optimized devices, device prototyping, and laboratory scale/relevant environment testing such as to achieve TRL 5-6.

Principal Investigator:

Kevin Harsh
Principal Investigator
3035169075
harshk@sporian.com

Business Contact:

Michael Usrey
Business Official
3035169075
musrey@sporian.com
Small Business Information at Submission:

Sporian Microsystems, Inc.
515 Courtney Way, Suite B Lafayette, CO 80026-8821

EIN/Tax ID: 841531263
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No