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Cryogenic MEMS Technology for Sensing Applications

Award Information

National Aeronautics and Space Administration
Award ID:
Program Year/Program:
2011 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
MEMtronics Corporation
1301 N. Plano Road Richardson, TX -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2011
Title: Cryogenic MEMS Technology for Sensing Applications
Agency: NASA
Contract: NNX11CE76P
Award Amount: $99,522.00


The development of cryogenic microwave components, such as focal plane polarization modulators, first requires an RF MEMS switching technology that operates effectively at cryogenic temperatures. The approach of this project is to explore the performance of capacitive MEMS switching technology at low temperatures. MEMS capacitive switches represent an alternative to ohmic contact switches, where the RF impedance of the device is not dependent on metal-metal contacts. These MEMS switches operate with much lower effective series resistance (generally ~ 0.25 ohms) and do not have the issues associated with dry contact switching. This technology also has the advantage of operating very well at millimeter-wave frequencies and higher, where many of the most demanding performance limitations exist. This technology has seen significant investment through DARPA and the DOD, and is directly applicable to high-performance microwave components needed in several of the upcoming NASA missions.

Principal Investigator:

Chuck Goldsmith
Principal Investigator

Business Contact:

Charles L. Goldsmith
Small Business Information at Submission:

MEMtronics Corporation
3000 Custer Road, Suite 270-400 Plano, TX 75075-4422

EIN/Tax ID: 752953681
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No