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Picometer-Resolution MEMS Segmented DM

Award Information

Agency:
National Aeronautics and Space Administration
Branch:
N/A
Award ID:
Program Year/Program:
2011 / SBIR
Agency Tracking Number:
104554
Solicitation Year:
2010
Solicitation Topic Code:
S2.02
Solicitation Number:
Small Business Information
Iris AO, Inc.
2680 Bancroft Way Berkeley, CA 94704-1717
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2011
Title: Picometer-Resolution MEMS Segmented DM
Agency: NASA
Contract: NNX11CE94P
Award Amount: $100,000.00
 

Abstract:

Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power specifications that are far lower than conventional piezoelectric and electrostrictive DMs. However, building a MEMS DM with a relatively large aperture that is flat in the unpowered state is challenging. Currently, a large portion of the mirror stroke must be used to flatten the MEMS DMs and in some cases, the DM stroke is not even sufficient to flatten the mirror. In the case of the large-stroke segmented MEMS DMs manufactured by Iris AO, there is sufficient stroke for wavefront correction after flattening. However, the resolution is significantly reduced because the dynamic range of the digital-to-analog converters (DAC) used to operate the DM is spread over multiple microns of stroke rather than the 0.5µm range required to correct for aberrations in the telescope that feeds the coronagraph. This Phase I SBIR will make substantial improvements in the fabrication process of MEMS segmented DMs that reduce the deleterious residual surface-figure errors. It will do so by systematically addressing the sources of the segment position variations as well as addressing low-spatial frequency chip bow that can result in large peak-to-valley deformations across the DM array. The Iris AO DM architecture will also be modified to enable picometer resolution actuation with ultra-precision drive electronics.

Principal Investigator:

Michael A. Helmbrecht
Principal Investigator
5108492375
michael.helmbrecht@irisao.com

Business Contact:

Michael A. Helmbrecht
Business Official
5108492375
michael.helmbrecht@irisao.com
Small Business Information at Submission:

Iris AO, Inc.
2680 Bancroft Way Berkeley, CA 94704-1717

EIN/Tax ID: 043693091
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No