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MEMS Gyroscope with Interferometric Detection

Award Information

Agency:
National Aeronautics and Space Administration
Branch:
N/A
Award ID:
Program Year/Program:
2011 / SBIR
Agency Tracking Number:
104964
Solicitation Year:
2010
Solicitation Topic Code:
O4.01
Solicitation Number:
Small Business Information
Fine Structure Technology LLC
5114 Balcones Woods Drive, Suite 307 PMB 305 Austin, TX -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2011
Title: MEMS Gyroscope with Interferometric Detection
Agency: NASA
Contract: NNX11CG42P
Award Amount: $99,852.00
 

Abstract:

This SBIR Phase I project will develop a MEMS gyroscope that uses an ultra high resolution sensing technique for measuring proof mass motion. The goal is to demonstrate the feasibility of this concept by understanding the optical, mechanical, and electrical performance characteristics that result from using micro interferometric sensing in a MEMS gyroscope. Specific objectives of the Phase I effort are to (1) develop a system level model that captures the behaviors of interest and enables design decisions (2) demonstrate sufficient optical performance for high resolution sensing in a prototype scale package and (3) show that this sensing technique improves device stability by enabling a design with a large separation between the sense resonance frequency and drive resonance frequency. This large separation in frequencies results in a device with much greater stability and better performance over temperature enabling the use of this technology in metric tracking hardware and tactical navigation applications. The TRL at the beginning of the contract is between zero and one. At the end of the contract the TRL will be 3.

Principal Investigator:

Matthew Ellis
Principal Investigator
4255168442
matt@finestructuretech.com

Business Contact:

Matthew Ellis
Business Official
4255168442
matt@finestructuretech.com
Small Business Information at Submission:

Fine Structure Technology LLC
5114 Balcones Woods Drive, Suite 307 PMB 305 Austin, TX -

EIN/Tax ID: 271744873
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No