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Novel Polishing Process to Fabricate Ultra Low Thickness Variation Diamond…

Award Information

Department of Energy
Award ID:
Program Year/Program:
2011 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
45 b
Solicitation Number:
Small Business Information
Sinmat Inc
1912 NW 67th Place Gainesville, FL 32653-1649
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Woman-Owned: Yes
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2011
Title: Novel Polishing Process to Fabricate Ultra Low Thickness Variation Diamond Substrates for Next Generation Beam Tracking Detectors
Agency: DOE
Contract: DE-FG02-11ER90095
Award Amount: $150,000.00


Diamond crystals with small total thickness variation (TTV) and local thickness variation (LTV) values are needed for position sensitive fast particle detectors for particle tracking/timing, and detecting direct/indirect beams. The fabrication of ultra-flat, low surface defectivity diamond detectors represents a major technological challenge. Although current commercial technology can produce 100m thick, high quality diamond crystals, the current state-of-the-art polishing methods are unable to polish diamond crystals with low thickness variation (typically lesser than few microns). Sinmat has developed a novel reactive chemical mechanical polishing (RCMP) process to polish, planarized, and flatten diamond crystal surfaces that are needed for manufacturing ultra-flat, low surface defectivity diamond detectors. By combining this process with special engineered sample holders, ultra-low TTV and LTV surfaces can be fabricated (with TTV lesser than 1 micron). Commercial Application and Other Benefits: The ability to achieve ultra-flat and defect free diamond crystals will be very beneficial for several applications in the fields of nuclear instrumentation, nuclear radiators, x-ray optics, and next generation electronics. Such devices will help in improving detection systems, instrumentation, and various techniques used in nuclear physics. Such engineered ultra-smooth diamond substrates could also be used for heat dissipation in silicon based electronics

Principal Investigator:

Arul C. Arjunan

Business Contact:

Deepika Singh
Small Business Information at Submission:

Sinmat Inc.
1912 NW 67th Place Gainesville, FL -

EIN/Tax ID: 593645729
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No