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Defect Reduction at the Silicon (112) Wafer Surface by Amorphization and…

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
Program Year/Program:
2011 / STTR
Agency Tracking Number:
B11A-002-0020
Solicitation Year:
2011
Solicitation Topic Code:
MDA11-T002
Solicitation Number:
2011.A
Small Business Information
Amethyst Research Incorporated
123 CASE CIRCLE ARDMORE, OK -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2011
Title: Defect Reduction at the Silicon (112) Wafer Surface by Amorphization and Recrystallization
Agency / Branch: DOD / MDA
Contract: HQ0147-11-C-7674
Award Amount: $99,912.00
 

Abstract:

Silicon wafers oriented on (112) are the preferred substrates for deposition of mercury cadmium telluride layers by molecular beam epitaxy. Surface defects introduced during polishing of the wafers degrade the quality of the epitaxy and the performance of infrared detectors fabricated within these materials. We propose a process for reducing the density of the defects that are inherent in the silicon and induced during wafer-polishing. The new process begins by ion implantation to render the region near the wafer surface amorphous. Industry-standard chemical-mechanical polishing of the amorphous surface will yield a surface that is smooth. This layer will then be recrystallized by a high-temperature anneal. Prior to annealing, hydrogenation of the wafer will be done to suppress defect formation during recrystallization. We anticipate that improvements in the quality of the (112) silicon surface will lead to higher operability values for LWIR focal plane arrays.

Principal Investigator:

John Dinan
Senior Research Scientist
(703) 360-3872
dinan@amethystresearch.com

Business Contact:

Todd Speaks
Comptroller
(580) 226-2751
accounts@amethystresearch.com
Small Business Information at Submission:

Amethyst Research Incorporated
123 Case Circle Ardmore, OK -

EIN/Tax ID: 562472936
DUNS: N/A
Number of Employees:
Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
Research Institution Information:
Texas State University
601 University Dr.
San Marcos, TX 78666-
Contact: Thomas Myers
Contact Phone: (512) 245-1839