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Roll to Roll Nanoimprinting

Award Information

Department of Defense
Office of the Secretary of Defense
Award ID:
Program Year/Program:
2011 / STTR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
1807-C West Braker Lane Suite 100 Austin, TX 78758-
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2011
Title: Roll to Roll Nanoimprinting
Agency / Branch: DOD / OSD
Contract: FA9550-11-C-0046
Award Amount: $100,000.00


In this phase 1 STTR, a roll-to-roll (R2R), high throughput nanoimprint lithography system and process prototype will be developed based on Molecular Imprints Inc."s Jet and Flash Imprint Lithography (J-FIL) technology. The R2R system will incorporate resist ink jetting with web tension control to achieve sub-50nm lithography and the following key process attributes: (i) Thin and uniform residual layer control with a target sub-15nm (mean) and sub-2nm (sigma); (ii) High aspect ratio patterns (>3:1 ratio) at 50nm resolution with arbitrary complexity; (iii) High throughput with target of>5m/min; and (iv) low resist material usage (~50-150 micro-liters/m2). The resulting process will allow pattern transfer into dielectrics and metal films with control in pattern size and complexity; and the cost structure will be attractive even for commodity applications such as thin-film solar cells. This process could be applied to applications such as large area sub-wavelength photonics devices, displays, and solar cells. We will focus on plasmonic nanostructures for thin-film solar cells based on amorphous silicon. We will perform simulation studies to obtain optimal plasmonic structures for maximizing absorption at long wavelengths over a broad band. We will then demonstrate fabrication (including pattern transfer) of these representative plasmonic patterns in appropriate film stacks.

Principal Investigator:

Jin Choi
Director for Advanced Technology
(512) 334-7760

Business Contact:

Adam Feinstein
Product Marketing Engineer
(512) 334-1208
Small Business Information at Submission:

Molecular Imprints, Inc.
1807-C West Braker Lane Suite 100 Austin, TX 78758-

EIN/Tax ID: 742994370
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
University of Texas at Austin
Microelectronics Research Cent
10100 Burnet Rd., Bldg. 160
Austin, TX 78758-
Contact: Edward Yu
Contact Phone: (512) 232-5167