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Precise fabrication of photonic integrated systems using low cost nanoimprint…

Award Information

Department of Defense
Office of the Secretary of Defense
Award ID:
Program Year/Program:
2011 / STTR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
4515 settles bridge rd Suwanee, GA 30024-
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2011
Title: Precise fabrication of photonic integrated systems using low cost nanoimprint process
Agency / Branch: DOD / OSD
Contract: FA9550-11-C-0070
Award Amount: $100,000.00


In this STTR proposal, we propose to develop a cost-effective and high-fidelity nanoimprint process for the fabrication of integrated photonics devices. VLSI photonics applications require a hig-level of control on device-to-device uniformity. Nanoimprint lithography (NIL) holds promise to overcome the current technological challenges in lithography while being cost effective at the same time. One of the key features of NIL is its ability to preserve and directly translate the lithography patterns from the mold, which should enable highly improved device-to-device uniformity within a die and between die-to-die on a wafer. In this proposal, we will demonstrate the feasibility of using NIL for photonics applications, especially for VLSI integrated photonics structures.We will develop a robust fabrication process that uses NIL to fabricate photonics structures. We will also demonstrate the feasibility of CMOS compatible and passive post fabrication tuning process based on NIL to tune the optical properties of the photonic structures. It will be shown in the course of this proposal that devices fabricated using NIL suffer from lower chip-to-chip variations than those fabricated using e-beam lithography while maintaining the same quality. This effort will also prove a first step for extending the application of NIL in opto-electronics and IC fabrication.

Principal Investigator:

Murtaza Askari
Research Engineer
(404) 966-4669

Business Contact:

Paul Hart
Contracting Officer
(404) 894-6929
Small Business Information at Submission:

4515 settles bridge rd Suwanee, GA 30024-

EIN/Tax ID: 295835999
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
Georgia Institute of Technology
777 Atlantic Dr
Atlanta, GA 30332-
Contact: Gary S. May
Contact Phone: (404) 894-2902