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In-situ Stress and Temperature Optical Monitoring for low-cost heteroepitaxial…

Award Information

Agency:
Department of Defense 		Branch:
N/A 		Award ID:
 Program Year/Program:
2011 / SBIR
Agency Tracking Number:
A2-4635 		Solicitation Year:
2009 		Solicitation Topic Code:
A09-151 		Solicitation Number:
2009.3
Small Business Information
k-Space Associates, Inc.
2182 Bishop Circle East Dexter, MI -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2011
Title: In-situ Stress and Temperature Optical Monitoring for low-cost heteroepitaxial substrates for HgCdTe infrared detectors.
Agency: DOD
Contract: W909MY-11-C-0065
Award Amount: $723,505.00
 

Abstract:

An integrated, in-situ, real-time, optical metrology system will be developed to measure temperature, film stress and reflectivity during CdTe and HgCdTe-based deposition applications. Temperature measurement will be performed using band-edge thermometry and blackbody radiation analysis to provide a measurement range of 25-800 degrees C on Si, GaAs, and CdTe-buffered Si/GaAs substrates. The system will be capable of full 2D substrate temperature profiling to provide uniformity analysis. Stress and reflectivity measurement will be made using an etalon-based multiple laser beam array. All measurements will be made simultaneously and will be synchronized to the substrate rotation. The system will be designed with the flexibility to be mounted on multiple reactor geometries.

Principal Investigator:

Charles Taylor
Product Development Manag
(734) 426-7977
cataylor@k-space.com

Business Contact:

Darryl Barlett
General Manager
(734) 426-7977
djbarlett@k-space.com
Small Business Information at Submission:

k-Space Associates, Inc.
2182 Bishop Circle East Dexter, MI -

EIN/Tax ID: 383059777
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No