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Atomic Layer Deposition of PbZrxTi1-xO3 Thin Films for PiezoMEMS Applications

Award Information

Agency:
Department of Defense
Branch:
Army
Award ID:
Program Year/Program:
2012 / STTR
Agency Tracking Number:
A12A-020-0031
Solicitation Year:
2012
Solicitation Topic Code:
A12a-T020
Solicitation Number:
2012.A
Small Business Information
Structured Materials Industries
201 Circle Drive North Unit # 102 Piscataway, NJ 08854-
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2012
Title: Atomic Layer Deposition of PbZrxTi1-xO3 Thin Films for PiezoMEMS Applications
Agency / Branch: DOD / ARMY
Contract: W911NF-12-C-0083
Award Amount: $100,000.00
 

Abstract:

In this STTR program, Structured Materials Industries, Inc. (SMI) will develop process technology to deposit uniform films of piezoelectric PbZrxTi1-xO3, on substrates with complex 3-dimensional topography. Piezoelectric PbZrxTi1-xO3 films are a critical technology for advanced Micro Electro Mechanical System (MEMS), to provide low power actuation in nanoscale devices. Our technical approach is based on atomic layer deposition (ALD), which can achieve the required uniform film deposition over the extreme topography of advanced MEMS. The successful conclusion of this work will enable the development of micro robotic devices, for future biomedical, imaging and communication applications.

Principal Investigator:

Nick M. Sbrockey
Principal Scientist
(732) 302-9274
sbrockey@structuredmaterials.com

Business Contact:

Gary S. Tompa
President
(732) 302-9274
GSTompa@structuredmaterials.com
Small Business Information at Submission:

Structured Materials Industries
201 Circle Drive North Unit # 102 Piscataway, NJ -

EIN/Tax ID: 223175106
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
Penn State University
222 Northpointe Boulevard
Freeport, PA 16229-
Contact: Kevin White
Contact Phone: (724) 295-7000