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Atomic Layer Deposition of Lead Zirconate Titanate Thin Films for PiezoMEMS…

Award Information

Agency:
Department of Defense
Branch:
Army
Award ID:
Program Year/Program:
2012 / STTR
Agency Tracking Number:
A12A-020-0291
Solicitation Year:
2012
Solicitation Topic Code:
A12a-T020
Solicitation Number:
2012.A
Small Business Information
Maritime Applied Physics Corporation
1850 Frankfurst Avenue Baltimore, MD 21226-1024
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2012
Title: Atomic Layer Deposition of Lead Zirconate Titanate Thin Films for PiezoMEMS Applications
Agency / Branch: DOD / ARMY
Contract: W911NF-12-C-0093
Award Amount: $99,991.00
 

Abstract:

A big challenge in atomic layer deposition (ALD) of complex metal oxides is that the ALD temperature for one constituent oxide is often different from that of another. Researchers at University of California Los Angeles (UCLA), have developed thermal and radical enhanced ALD processes to address these concerns and realized the synthesis of many complex metal oxides, including PZT. Maritime Applied Physics Corporation (MAPC) is teaming up with UCLA to leverage this previous research and develop atomic layer deposition of PZT for MEMS scale actuation.

Principal Investigator:

Narsesse Nersessian
Principal Investigator
(443) 524-3330
n_nersessian@mapcorp.com

Business Contact:

Peter MacShane
Director - Business Development
(443) 524-3330
macs@mapcorp.com
Small Business Information at Submission:

Maritime Applied Physics Corporation
1850 Frankfurst Avenue Baltimore, MD -

EIN/Tax ID: 521513939
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
UCLA
Chemical and Biomolecular Eng
5532-D Boelter Hall
Los Angeles, CA 90095-
Contact: J.p. Chang
Contact Phone: (301) 206-7980